Structural Model and Characteristics of a Nanopiezoactuator for Nanoresearch

Abstract

In this work, the structural model and characteristics of a nanopiezoactuator for nanoresearch were derived using the piezoelasticity equation and the differential equation of the nanopiezoactuator, applying methods from applied mathematical physics. A nanopiezoactuator is a piezomechanical device that converts electrical energy into mechanical energy, enabling the actuation of mechanisms and systems within the nanodisplacement range or controlling them via the inverse piezoelectric effect. A nanopiezoactuator is utilized for nanoalignment and nanopositioning, temperature and gravitational deformation compensation, and spatial movement in various fields, including nanoresearch, nanotechnology, microelectronics, nanobiotechnology, scanning microscopy, astronomy, adaptive optics, large compound telescopes, deformable mirrors, mechatronics, robotics, and medical microsurgical equipment. The schemes, functions, and characteristics of a nanopiezoactuator are obtained from its structural model by method of applied mathematical physics. The structural model of the transverse piezoactuator is obtained for the voltage control. The characteristics of the transverse piezoactuator are received. Piezoceramic from PbZr1-xTixO3 (PZT) lead zirconate titanate is widely used in a nanopiezoactuators for its reliability, high accuracy, and simple control. The characteristics of the PZT transverse actuator are determined.

Received: 16 August 2024 | Revised: 4 November 2024 | Accepted: 22 November 2024

Conflicts of Interest

The author declares that he has no conflicts of interest to this work.

Data Availability Statement

Data sharing is not applicable to this article as no new data were created or analyzed in this study.

Author Contribution Statement

S. M. Afonin: Conceptualization, Methodology, Software, Validation, Formal analysis, Investigation, Resources, Data curation, Writing - original draft, Writing - review & editing, Visualization, Supervision, Project administration.